JPH0273736U - - Google Patents
Info
- Publication number
- JPH0273736U JPH0273736U JP15331088U JP15331088U JPH0273736U JP H0273736 U JPH0273736 U JP H0273736U JP 15331088 U JP15331088 U JP 15331088U JP 15331088 U JP15331088 U JP 15331088U JP H0273736 U JPH0273736 U JP H0273736U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- wet etching
- etching apparatus
- etching
- aluminum wet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15331088U JPH0273736U (en]) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15331088U JPH0273736U (en]) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0273736U true JPH0273736U (en]) | 1990-06-05 |
Family
ID=31429034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15331088U Pending JPH0273736U (en]) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0273736U (en]) |
-
1988
- 1988-11-25 JP JP15331088U patent/JPH0273736U/ja active Pending